Slit Valve Doors

PPE’s slit valve doors deliver lower particulation, improved yield and the lowest cost of ownership.

Slit Valve Doors (SVDs) play a key role in semiconductor wafer manufacture. PPE provides a range of SVD designs coupled with a range of elastomer materials developed specifically for aggressive semiconductor sealing applications. 

All PPE’s SVDs are produced to your exacting requirements, for optimal performance and reliability.

Slit valve door

PPE and Slit Valve Doors

PPE SVD’s maximize yields and extend PM cycles by utilizing ultra-pure, wear resistant elastomers that, when matched to specific process chemistries, provide long lifetime and minimized risk of particle contamination in dynamic door applications.

SVDs are available in designs for many OEM tool platforms and are optimized to offer the highest levels of sealing performance in aggressive environments.

For new applications PPE Engineers can provide advice on how best to optimize the SVD design, in order to maximize the performance and effective life of the seal.

Our high performance sealing materials:

PPE’s range of SVDs can be produced in the following material types for semiconductor applications:

The ultimate perfluoroelastomers for sealing applications where chemical resistance and high temperature performance are critical.

Kimura® elastomers span the range of fluoro and perfluoro (FKM and FFKM) materials and includes unique hybrid elastomers, specifically developed by PPE, for the semiconductor industry, to offer a step-change in sealing performance, surpassing what has previously been achievable for fully organic materials.

Nanofluor® elastomers can be considered as hybrid materials, bridging a gap between the low cost of fluoroelastomer (FKM) and high cost of perfluoroelastomer (FFKM) polymer types.

Frequently Asked Questions

Slit Valve Doors (SVDs) are a core component of various semiconductor process tools. They create a barrier between hostile process environments and the more mild areas of the equipment. Demands for ultra-purity and plasma resistance have resulted in the development of specific compounds for the Semiconductor industry.

Slit Valve Doors from PPE are available in a wide range of sizes, profiles and designs.

PPE’s Slit Valve Doors can be produced in a broad range of seal profiles which are designed to reduce localized stresses, resulting in improved seal performance and life time.

View our range of high performance materials

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