Dissipative elastomers

Dissipative End-Effector Pads
In addition to our standard end-effector pads, molded from insulating materials, dissipative elastomers can be used to manufacture end effector pads for sensitive devices or insulating substrates.

Reduce triboelectric charging and electrostatic damage (ESD)
Benefits of dissipative elastomers
Wafer handling components molded from dissipative materials combat triboelectric charging and reduce electrostatic discharge damage (ESD).
Benefits of using dissipative end effector pads include:
- Improved yield
- Increased profitability
- Reduced need for costly rework
- Improvement in end electronic system failure rates
- Reduced risk of process tool lock up, or failure from electromagnetic interference due to ESD
Dissipative materials from PPE
Material grade | Material type | Volume resistivity (Ohm-cm) | Hardness (Shore A) |
---|---|---|---|
Perlast G90DM | FFKM | 2.00E+3 | 91 |
Perlast G80DM | FFKM | 2.00E+5 | 80 |