Nanofluor® elastomers

Nanofluor® elastomers can be considered as hybrid materials, bridging a gap between the low cost of fluoroelastomer (FKM) and high cost of perfluoroelastomer (FFKM) polymer types. This material combines ultra-purity with excellent plasma resistance.

The range includes a fully organic ultra-low outgassing material and an inorganic filled grade with unique nano-filler to reduce erosion rates.

The nano-filled material provides a chemical inertness only seen in much more costly FFKM grades and has been developed for plasma ash or resist strip, chlorine and CxFy based etch processes.

Nanofluor range of sealing materials
Nanofluor elastomer O-rings

Nanofluor® grades provide some of the lowest trace metal contamination levels found in elastomer seals, with ultra-low permeation rates.

Key attributes of Nanofluor®

Nanofluor® elastomers are advanced, ultra-pure elastomers which use a nano-filler system. This is characterised by material attributes including:

  • Ultra-high purity – with extremely low trace metal contaminants which may cause electrical yield problems.
  • Excellent plasma resistance – ideal for most plasma chemistries except high F-radical processes, and comparable with FFKM grades.
  • Low coefficient of thermal expansion
  • Retro-fits existing O-ring grooves (including FKM & FFKM grooves)
  • Low permeation
  • Low out-gassing

Resources

Below are some of our most popular resources on sealing for semiconductor applications.

If you require further information on any sealing topic, please check out the Resources section of this website.

Nanofluor range of sealing materials

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