Kimura® elastomers

Kimura is a unique range of fully organic elastomers ideally suited to thermal, dynamic and specific plasma processes, where radical concentrations are generally lower, or where inorganic filler systems are undesirable.

The Kimura® range of high performance elastomer materials utilize a controlled molecular architecture which provides a unique self-reinforcing polymer structure, providing improved chemical resistance without the use of inorganic fillers of any kind. This high purity material breaks new ground in elastomer technology, developed specifically for aggressive chlorine and CxFy based semiconductor applications.

Kimura sealing grades
Banner image for Kimura

Kimura® is a family of sealing materials which combine exceptional purity with the absence of inorganic fillers – ideal for lower feature sizes.

Key attributes of Kimura

Kimura® elastomers span the range of fluoro and perfluoro (FKM and FFKM) materials and includes unique hybrid elastomers, specifically developed by PPE, for the semiconductor industry, to offer a step-change in sealing performance, surpassing what has previously been achievable for fully organic materials.

  • Exceptionally pure – does not contain any inorganic fillers which may lead to particle generation
  • High thermal stability
  • Low thermal expansion – retro-fits existing O-ring grooves (including FKM and FFKM grooves)
  • Low compression set, for extended seal life
  • Low permeation
  • Low out-gassing
  • Low adhesion (reduced sticking)

Resources

Below are some of our most popular resources on sealing for semiconductor applications.

If you require further information on any sealing topic, please check out the Resources section of this website.

Kimura elastomer parts

Looking for more technical detail? Check out our Resources & Tools.

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