Wafer Handling Components
High purity, Perlast® and Kimura® materials are widely used in wafer handling applications as end effector pads because they provide optimized friction to maintain wafer positional accuracy, and prevent particulation due to their wholly organic nature.
PPE are experts in providing elastomeric solutions and can help you optimize your designs using our materials expertise and advanced design tools, such as non-linear finite element analysis.
Custom designed wafer handling components ensure improved pad retention into mating hardware, simplified assembly and optimum friction to allow fast robotic handling.
The PPE range of materials includes elastomers with both low and high coefficients of friction, to allow tailoring of wafer retention force. In addition, PPE offers dissipative end-effectors molded from unique elastomer materials to reduce electrostatic discharge (ESD) damage.
Materials for Wafer Handling Components
PPE can manufacture wafer handling components in the following material types for semiconductor applications:

Perlast
expand_moreThe ultimate perfluoroelastomers for sealing applications where chemical resistance and high temperature performance are critical.
Kimura®
expand_moreKimura® elastomers span the range of fluoro and perfluoro (FKM and FFKM) materials and includes unique hybrid elastomers, specifically developed by PPE, for the semiconductor industry, to offer a step-change in sealing performance, surpassing what has previously been achievable for fully organic materials.
Frequently Asked Questions
What is the function of the end effector pad / Wafer handling pad? expand_more
What are dissipative elastomers? expand_more
In addition to our standard end-effector pads molded from insulating materials, dissipative end effector pads can also be provided for sensitive devices or insulating substrates. Wafer handling components molded from dissipative elastomers combat triboelectric charging and reduce electrostatic discharge (ESD) damage.
Benefits of using dissipative end effector pads:-
- improved yield
- increased profitability
- reduced need for costly rework
- improvement in end electronic system failure rates
- reduced risk of process tool lock up or failure from electromagnetic interference due to ESD