Semiconductor, Flat Panel Display and Solar

Deposition, etch, ash/strip, plasma and thermal processing or annealing, are synergistic process technologies that represent some of the most challenging environments for elastomer seal materials, often encountered during the manufacture of:

• Semiconductor integrated circuits
• Flat panel displays (FPD)
• Solar cells (crystalline, multi-crystalline, concentrator)
• MEMS
• LED / OLED

PPE provides clean room manufactured seals with low particle and low trace metal contamination for minimized yield loss and low chemical erosion rates that offer the following benefits:-

• Extended system up-time
• Increased mean time between failure (MTBF)
• Decreased wet clean or mechanical clean frequency
• Minimized cost of ownership (CoO) through reduced cost of consumables (CoC)

Elastomer material recommendation is dependent on process chemistry, temperature, specific hardware location, proximity to the substrate, device type being manufactured and technology node.  PPE offers a wide range of materials from its Perlast^®, Kimura^® and Nanofluor^® ranges and is able to intelligently match the perfect material to the process type, system location and end user product complexity.  

For harsh plasma applications, PPE have developed unique nano-filled materials that perform significantly better than any other sealing material on the market.

Discover which PPE materials are recommended for thermal, plasma and wet chemical processes.

PPE's semiconductor product range includes O-rings, slit valve doors, KF/ISO/NW fittings, end effector pads and custom components.

 How can we help you?  Contact our semiconductor sealing experts.