Semiconductor, Flat Panel Display and Solar
Deposition, etch, ash/strip, plasma and thermal processing or annealing, are synergistic process technologies that represent some of the most challenging environments for elastomer seal materials, often encountered during the manufacture of:
- Semiconductor integrated circuits
- Flat panel displays (FPD)
- Solar cells (crystalline, multi-crystalline, concentrator)
- LED / OLED
PPE provides clean room manufactured seals with low particle and low trace metal contamination for minimized yield loss and low chemical erosion rates that offer the following benefits:-
- Extended system up-time
- Increased mean time between failure (MTBF)
- Decreased wet clean or mechanical clean frequency
- Minimized cost of ownership (CoO) through reduced cost of consumables (CoC)
Elastomer material recommendation is dependent on process chemistry, temperature, specific hardware location, proximity to the substrate, device type being manufactured and technology node. PPE offers a wide range of materials from its Perlast®, Kimura® and Nanofluor® ranges and is able to intelligently match the perfect material to the process type, system location and end user product complexity.
For harsh plasma applications, PPE have developed unique nano-filled materials that perform significantly better than any other sealing material on the market.
Discover which PPE materials are recommended for thermal, plasma and wet chemical processes.
PPE's semiconductor product range includes O-rings, slit valve doors, KF/ISO/NW fittings, end effector pads and custom components.
How can we help you? Contact our semiconductor sealing experts.
Semicon manufacturing processes
Discover which PPE materials are recommended for semiconductor processes
Low erosion rates, trace metal levels and particle release rates are required from sealing materials, in critical locations within aggressive Oxygen and NF3 plasma processes, to avoid contamination.
Processes such as ALD, LPCVD, SACVD, annealing and oxidation require seal materials able to withstand long term high temperatures, oxygen, ozone and high energy UV radiation.
PPE Material Brands
Elastomer material brands typically used in semiconductor applications
The ultimate perfluoroelastomers for sealing applications where chemical resistance and high temperature performance are critical.
A unique range of fully organic elastomers ideally suited to thermal, dynamic and specific plasma processes
Products for Semiconductor Applications
Below is a selection of the most common products we supply to the semiconductor industry. Visit the Products page to see the full range.
KF - ISO - NW Flange Fittings (Centering Rings)
NW, KF and ISO size centering ring flange fittings provide reliable vacuum seals within critical semiconductor environments.
With a specialist elastomer for every sealing application, our engineers can identify an elastomer O-ring to perform perfectly in your operating environment.
Custom designed wafer handling components ensure improved pad retention into mating hardware, simplified assembly and optimum friction to allow fast robotic handling.
Chemical compatibility, thermo-mechanical evaluation, failure analysis and explosive decompression testing are services available from PPE's laboratories.
PPE offers a comprehensive design and modelling service for seals, custom moulded elastomers and bonded components.