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Semiconductor, flat panel display and solar

Deposition, etch, ash/strip, plasma and thermal processing or annealing, are synergistic process technologies that represent some of the most challenging environments for elastomer seal materials, often encountered during the manufacture of:-

  • Semiconductor integrated circuits
  • Flat panel displays (FPD)
  • Solar cells (crystalline, multi-crystalline, concentrator)
  • MEMS
  • LED / OLED

PPE provides clean room manufactured seals with low particle and low trace metal contamination for minimized yield loss and low chemical erosion rates that offer the following benefits:-

  • Extended system up-time
  • Increased mean time between failure (MTBF)
  • Decreased wet clean or mechanical clean frequency
  • Minimized cost of ownership (CoO) through reduced cost of consumables (CoC)

Elastomer material recommendation is dependent on process chemistry, temperature, specific hardware location, proximity to the substrate, device type being manufactured and technology node.  PPE offers a wide range of materials from its Perlast®, Kimura® and Nanofluor® ranges and is able to intelligently match the perfect material to the process type, system location and end user product complexity.  

For harsh plasma applications, PPE have developed unique nano-filled materials that perform significantly better than any other sealing material on the market.

Discover which PPE materials are recommended for thermalplasma and wet chemical processes.

PPE's semiconductor product range includes O-rings, slit valve doors, KF/ISO/NW fittings, end effector pads and custom components.

 How can we help you?  Contact our semiconductor sealing experts or start a discussion online using live chat.

Document Download
Document Description Download
Brochure Sealing Solutions for Semiconductor
Brochure Dissipative End Effectors
Brochure Slit Valve Doors
Brochure Kimura elastomers

Semicon manufacturing processes

Discover which PPE materials are recommended for semiconductor processes

PPE Material Brands

Elastomer material brands typically used in semiconductor applications

Products for Semiconductor Applications

Below is a selection of the most common products we supply to the semiconductor industry. Visit the Products page to see the full range.

Services available

See PPE at the following events
Event Event Location Event Date
SEMICON West 2017 Booth #6668, Moscone Center, San Francisco, CA, United States 11/07/2017 - 13/07/2017
SEMICON Taiwan 2017 Booth #384, Taipei Nangang Exhibition Center, Taipei, Taiwan 13/09/2017 - 15/09/2017
Event Date Event Details
11/07/2017 - 13/07/2017 SEMICON West 2017 Booth #6668, Moscone Center, San Francisco, CA, United States
13/09/2017 - 15/09/2017 SEMICON Taiwan 2017 Booth #384, Taipei Nangang Exhibition Center, Taipei, Taiwan
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