Slit Valve Doors
For extended life, improved performance and reduced total cost of ownership
PPE provides a wide range of bonded Slit Valve Door (SVD) designs coupled with an extensive range of high purity elastomer seals developed specifically for aggressive semiconductor sealing applications.
Shaped non bonded gate seals are also available in specific customized cross-sections to improve fitment and reduce stress related wear.
PPE’s range of slit valve doors includes flat and L-motion type bonded doors and MONOVAT® gates that offer the ultimate in plasma resistance, reduced particle formation and long term reliable mechanical performance.
Utilizing a range of high performance elastomers, PPE’s slit valve doors are designed to provide the highest sealing integrity , delivering improved yields, increased time between PM cycles and minimized particle generation.
A customized design service is available to engineer both new or, existing bonded slit valve door products.
Features of PPE Slit Valve Doors
- Fit a variety of OEM platforms
- Available with Perlast®, Kimura® and Nanofluor®, our unique semiconductor-grade elastomers - minimizing the potential for particle formation in plasma environments
- Optimized seal designs to remove localized stresses, extending seal life
How can we help? Contact us to discuss your SVD requirements.
PPE offers a comprehensive design and modelling service for seals, custom moulded elastomers and bonded components.Find Out More