Plasma resistance of elastomers

How do you choose the right O-ring seal material?

Plasma resistance for common process chemistries

In order to provide accurate material recommendations for specific semiconductor plasma processes, PPE has tested a variety of elastomer materials, including those from other material suppliers.

The compounds were exposed to a number of different plasma chemistries commonly used in etch processes and deposition chamber cleaning processes. Elastomer materials can have different resistance to specific process chemistries and are generically improved by using a specific type of reinforcement or filler system and increased amounts of filler materials. The choice of material can also depend on several other factors such as, mechanical property requirements, device sensitivity to trace metal contaminants and filler particle size and type.

Accurate data will provide the following benefits:-

  • Relative material performance and life-time comparison to base your selection decision on,
  • Save time and effort in researching and qualifying new materials,
  • Reduce the risk of choosing the wrong material.

The table below is a summary of PPE material erosion rates in four basic plasma chemistries.

ChemistryPlasma
Source
FKM
V75C
Perlast
G76W
Perlast
G75H
Perlast
G74P
Perlast G67P
Perlast
G100XT
Perlast
G7HA
Perlast
G65HP
Perlast
G70H
Filler system InorganicInorganicInorganicOrganic nanoOrganic nanoOrganic nanoOrganicOrganic nanoInorganic
 O2Remote inductively coupled plasma23779582
 Cl2 + BCl3
+ HBr
RIE 136889752
 SF6 + O2Remote inductively coupled plasma 522769231
 F - radicalRemote inductively coupled plasma 846657321
Trace metal level  H I G A A B B B G

Key:
1 = Best (lowest erosion rate), 10 = Worst (highest trace metal level (ppb))
A = Best (lowest trace metal level (ppb)), G = Worst (highest trace metal level (ppb)) 
Materials are listed in order of relative price, lowest on the left to highest on the right.

Want to see the results in more detail or learn more?
Contact our experts who will be happy to share the results of the testing.

Document Downloads
Document Description Download
Whitepaper Purity or Plasma Resistance - can you have both? Download File
Whitepaper Killer Consumables: How clean are your seals? Download File
Technical Information Plasma Resistance - Nanofluor Y75G Download File
Brochure Sealing Solutions for Semiconductor Download File
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