Perlast perfluoroelastomers for semiconductor applications

PPE developed the first high purity, translucent grades of Perlast^® perfluoroelastomer back in the 1990's.  Since then, PPE has led the field by continuously innovating new FFKM materials to stay ahead of Moore's law, including our latest material Perlast^® Helios G7HA.

Our range of Perlast^® perfluoroelastomer materials for semiconductor applications are at the leading edge of polymer technology. They have been developed to offer superior sealing solutions with enhanced performance and improved functionality, that provide the following proven benefits:-

• Extended system up-time from increased in-service seal life-time
• Reduced machine/equipment downtime
• Extended machine/equipment planned maintenance (PM) intervals
• Optimized process conditions resulting in increased machine/equipment output
• Reduced process contamination
• Minimized cost of ownership (CoO) through reduced cost of consumables (CoC)

Perlast^® semiconductor FFKM grades have been proven to offer the lowest particle and trace metal contamination for minimized yield loss and low chemical erosion rates.

Which Perlast^® grade?

Elastomer material recommendation is dependent on process chemistry, temperature, specific hardware location, proximity to the substrate, device type being manufactured and technology node.  Discover which Perlast^® perfluoroelastomer materials are recommended for thermal, plasma and wet chemical semiconductor processes.

Perlast^® semiconductor grade O-rings and seals are manufactured exclusively in PPE's clean rooms located in Blackburn, UK and Brenham, Texas.  Perlast^® perfluoroelastomers are available as fully molded components including O-rings, KF/ISO/NW fittings, end effector pads and custom components.

How can we help you?   Our semiconductor sealing experts are ready to help; contact PPE directly or find your nearest sales contact.