Perlast perfluoroelastomers for semiconductor applications
PPE developed the first high purity, translucent grades of Perlast® perfluoroelastomer back in the 1990's. Since then, PPE has led the field by continuously innovating new FFKM materials to stay ahead of Moore's law, including our latest material Perlast® Helios G7HA.
Our range of Perlast® perfluoroelastomer materials for semiconductor applications are at the leading edge of polymer technology. They have been developed to offer superior sealing solutions with enhanced performance and improved functionality, that provide the following proven benefits:-
- Extended system up-time from increased in-service seal life-time
- Reduced machine/equipment downtime
- Extended machine/equipment planned maintenance (PM) intervals
- Optimized process conditions resulting in increased machine/equipment output
- Reduced process contamination
- Minimized cost of ownership (CoO) through reduced cost of consumables (CoC)
Perlast® semiconductor FFKM grades have been proven to offer the lowest particle and trace metal contamination for minimized yield loss and low chemical erosion rates.
Which Perlast® grade?
Elastomer material recommendation is dependent on process chemistry, temperature, specific hardware location, proximity to the substrate, device type being manufactured and technology node. Discover which Perlast® perfluoroelastomer materials are recommended for thermal, plasma and wet chemical semiconductor processes.
Perlast® semiconductor grade O-rings and seals are manufactured exclusively in PPE's clean rooms located in Blackburn, UK and Brenham, Texas. Perlast® perfluoroelastomers are available as fully molded components including O-rings, KF/ISO/NW fittings, end effector pads and custom components.
Discover which Perlast® materials are recommended for semiconductor processes
Low erosion rates, trace metal levels and particle release rates are required from sealing materials, in critical locations within aggressive Oxygen and NF3 plasma processes, to avoid contamination.
Processes such as ALD, LPCVD, SACVD, annealing and oxidation require seal materials able to withstand long term high temperatures, oxygen, ozone and high energy UV radiation.
Perlast semiconductor product range
With a specialist elastomer for every sealing application, our engineers can identify an elastomer O-ring to perform perfectly in your operating environment.
Large Diameter O-rings & Seals
Fully molded, high quality, large diameter O-rings manufactured in sizes up to 2.5 metres (8ft) outer diameter, with no joined or spliced ends.
Custom Rubber Seals
PPE designs and manufactures custom molded rubber parts and bespoke engineered components in infinite shapes and profiles to meet any sealing requirements.
KF - ISO - NW Flange Fittings (Centering Rings)
NW, KF and ISO size centering ring flange fittings provide reliable vacuum seals within critical semiconductor environments.