A unique range of fully organic elastomers ideally suited to thermal, dynamic and specific plasma processes where radical concentrations are generally lower or where inorganic filler systems are undesirable.
The Kimura® range of high performance elastomer materials utilize a controlled molecular architecture which provides a unique self-reinforcing polymer structure, providing improved chemical resistance without the use of inorganic fillers of any kind. This high purity material breaks new ground in elastomer technology, developed specifically for aggressive chlorine and CxFy based semiconductor applications.
Kimura® elastomers span the range of fluoro and perfluoro (FKM and FFKM) materials and includes unique hybrid elastomers, specifically developed by PPE, for the semiconductor industry, to offer a step-change in sealing performance, surpassing what has previously been achievable for fully organic materials.
The high purity of the polymer combined with the absence of inorganic fillers makes Kimura® materials suitable for processes involving lower feature sizes.
Key Material Attributes:
- Exceptionally pure - does not contain any inorganic fillers which may lead to particle generation
- High thermal stability
- Low thermal expansion - retro-fits existing O-ring grooves (including FKM & FFKM grooves)
- Low compression set for extended seal-life
- Low permeation
- Low out-gassing
- Low adhesion (reduced sticking)
Kimura® is a registered trademark of Precision Polymer Engineering Ltd
How can we help? Contact us to discuss your sealing requirements with our experts.
|Brochure||Kimura High Performance Elastomers|
|Technical Information||Trace Metal Contamination from Elastomers|