AMAT Materials
Applied Materials’ range of available materials from PPE
The table below shows the material grades that are currently available for use by Applied Materials.
Material datasheets can be downloaded by clicking on the PDF link in the last column.
| Compound | Material Type | Color | Operating Temperature | Process Type | Attributes | Datasheet |
|---|---|---|---|---|---|---|
| Perlast® GAM6 (AMAT exclusive) | FFKM | Brown | -15 to 320°C | Etching Deposition Stripping Cleaning Anneal LPCVD/HDPCVD PCVD/SACVD/ALD PVD/MDP/EPI | Excellent high temperature sealing performance Excellent plasma resistance Excellent chemical resistance Low out-gassing performance Ultra-low trace metal content Very low particle generation | |
| Perlast® G67P | FFKM | Translucent | -15 to 275°C | PECVD/HDPCVD Wet Etch/Clean Photolithography Resist Strip | Fully organic Exceptional purity (>1K ppb trace metal content) Low particle generation Extremely low out-gassing | |
| Perlast® G74P | FFKM | Translucent | -15 to 275°C | Deposition Etch | Fully organic Exceptional purity | |
| Perlast® G100XT | FFKM | Clear Translucent | -20 to 275°C | E-UV | Fully organic Ultra-low out-gassing | |
| Perlast® G65HP | FFKM | Light Brown | -15 to 275°C | PECVD/HDPCVD Resist-Strip/Ash Dielectric Etch Condictor Etch NF3 Remote Clean | Fully organic Exceptional resistance to radical fluorine Excellent plasma resistance Very low particle generation | |
| Perlast® G67G | FFKM | Grey | -15 to 300°C | PECVD/HDPCVD Resist Strip/Ash Dielectric Etch Conductor Etch NF3 Remote clean UV cure | Exceptional oxygen & fluorine plasma resistance Low particle generation | |
| Perlast® G76W | FFKM | Ivory | -15 to 260°C | CVD | Cost effective, high performance perfluoroelastomer | |
| Perlast® G75H | FFKM | White | -15 to 320°C | Metal CVD ALD PVD LPCVD SACVD Oxidation diffusion RTP/Thermal Oxidation | High temperature stability Wide chemical resistance Outstanding physical properties Ideal for dynamic applications | |
| Perlast® G70H | FFKM | White | -15 to 310°C | PVD | Very good plasma resistance Very good abrasion resistance | |
| Perlast® G70CR | FFKM | Grey | -42 to 200°C | Conductor Etch Dielectric Etch | Low temperature Very good plasma resistance Low outgassing | |
| Perlast® G75B | FFKM | Black | -15 to 325°C | Metal CVD ALD PVD LPCVD SACVD Oxidation diffusion RTP/Thermal oxidation | Excellent high temperature stability Exceptional acid & amine resistance | |
| Nanofluor® Y75N | HPE | Amber/ Translucent | -20 to 225°C | Photolithography/Resist strip E-UV | Exceptional purity (>10K ppb trace metal content) Very low permeability Very low out-gassing | |
| Nanofluor® Y75G | HPE | Grey | -20 to 260°C | Resist Strip/Ash Dielectric Etch Conductor Etch | Exceptional oxygen & chlorine plasma resistance Very low trace metal content Low particle generation | |
| Nanofluor® Y60LT | HPE | Low temperature grade | Coming soon | |||
| Kimura® K13X | HPE | Brown/ Amber | -15 to 280°C | Dielectric etch | Fully organic Excellent abrasion resistance Ideal for dynamic applications Very low permeability | |
| V60B | FKM | Black | -20 to 200°C | Plating tools | Used on Slit Valve Doors (SVD) | Coming soon |
| V75B | FKM | Black | -20 to 200°C | PVD | 70 shore hardness Ideal for non-process areas | Coming soon |
| V75M | FKM | Brown | -20 to 200°C | Ideal for non-process areas | Coming soon | |
| V75SC | FKM | Cream | -15 to 250°C | Copper plating (ECD) | Very low permeability Cost effective high performance elastomer | |
| V75W | FKM | White | -20 to 200°C | Display test chambers | ||
| V77W | FKM | Off-white | -20 to 200°C | Display EBT tools | Low friction material Used on Slit Valve Doors (SVD) | Coming soon |
| V75B751 | FKM | Black | -20 to 200°C | OLED chambers | Coming soon | |
| V70M701 | FKM | Brown | PVD/MDP applications | Ideal for non-process areas | Coming soon |
