Date: November 8, 2017
Time: 10am EST (7am PST)
Duration: 1hr
Overview
In semiconductor manufacturing, particle contamination throughout the whole process flow is a significant threat to yield and hence profitability. This seminar will discuss the important role elastomer seals play in maintaining high yields in semiconductor manufacturing processes, and how the correct sealing material helps to maintain vacuum integrity.
Key Points:
- Learn how elastomer sealing materials can behave in different plasma conditions and gases.
- Find out the importance of different filler types and filler particle dispersion in elastomer materials.
- Discover solutions to minimise particulation and contamination caused by elastomer seals.
- Understand the cost/performance ratio between perfluoroelastomers (FFKMs) and fluoroelastomers (FKMs).