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Nanofluor® elastomers can be considered as hybrid materials, bridging a gap between the low cost of fluoroelastomer (FKM) and high cost of perfluoroelastomer (FFKM) polymer types.

The range includes a fully organic ultra-low outgassing material and an inorganic filled grade with unique nano-filler to reduce erosion rates. The nano-filled material provides a chemical inertness only seen in much more costly FFKM grades and been developed for plasma ash or resist strip, chlorine and CxFy based etch processes.

Nanofluor® grades provide some of the lowest trace metal contamination levels available from elastomer seals and ultra-low permeation rates.

Key Material Attributes:

  • Ultra pure with extremely low trace metal contaminants which may cause electrical yield problems.
  • Excellent plasma resistance – ideal for most plasma chemistries except high F-radical processes.
  • Plasma resistance comparable or superior to many competitive pure FFKM grades
  • Low coefficient of thermal expansion
  • Retro-fits existing O-ring grooves (including FKM & FFKM grooves)
  • Low permeation
  • Low out-gassing

Nanofluor® is a registered trademark of Precision Polymer Engineering Ltd

How can we help?  Contact us to discuss your sealing requirements with our experts.

Document Downloads
Document Description Download
Technical Information Plasma resistance of Nanofluor Y75G Download File
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