News for the semiconductor industry from Precision Polymer Engineering
With today’s nanoscale technology nodes, meeting cleanliness, purity and defect requirements has become increasingly challenging.
Particulation has always been a serious problem for the semiconductor industry. As the node sizes are getting below 10nm the requirements of the industry has becoming more stringent. Elastomer seals have always been under the spotlight for particulation.
Join Dr Murat Gulcur for a webinar on elastomer sealing in semiconductor manufacturing, the behaviour of different seals in different conditions and how this could impact on particulation and contamination.
Two new plasma resistant Perlast perfluoroelastomers (FFKM) will make their debut appearance at Semicon West in San, Francisco this week.