AMAT Approved Materials from PPE

The table below shows the material grades that are currently approved for use by Applied Materials.
Material datasheets can be downloaded by clicking on the PDF link in the last column.

CompoundMaterial
Type
ColorOperating
Temperature
Process TypeAttributesDatasheet
Perlast® G67PFFKMTranslucent-15 to 275°CPECVD/HDPVD
Wet Etch/Clean
Photolithography
Resist Strip
  • Fully organic
  • Exceptional purity (>1K ppb trace metal content)
  • Low particle generation
  • Extremely low out-gassing
PDF
Perlast® G74PFFKMTranslucent-15 to 275°C 
  • Fully organic
  • Exceptional purity
PDF
Perlast® G100XTFFKMClear
Translucent
-20 to 275°CE-UV
  • Fully organic
  • Ultra-low out-gassing
PDF
Perlast® G65HPFFKMLight Brown-15 to 275°CPECVD/HDPCVD
Resist-Strip/Ash
Dielectric Etch
Condictor Etch
NF3 Remote Clean
  • Fully organic
  • Exceptional resistance to radical flourine
  • Excellent plasma resistance
  • Very low particle generation
PDF
Perlast® G67GFFKMGrey-15 to 300°CPECVD/HDPCVD
Resist Strip/Ash
Dielectric Etch
Conductor Etch
NF3 Remote clean
UV cure
  • Exceptional oxygen & flourine plasma resistance
  • Low particle generation
 PDF
Perlast® G76WFFKMIvory-15 to 260°C 
  • Cost effective, high performance perfluoroelastomer
 PDF
Perlast® G75HFFKMWhite-15 to 320°CMetal CVD
ALD
PVD
LPCVD
SACVD
Oxidation diffusion
RTP/Thermal Oxidation
  • High temperature stability
  • Wide chemical resistance
  • Outstanding physical properties
  • Ideal for dynamic applications
 PDF
Perlast® G70HFFKMWhite-15 to 310°CPVD
  • Very good plasma resistance
  • Very good abrasion resistance
PDF 
Perlast® G75BFFKMBlack-15 to 325°CMetal CVD
ALD
PVD
LPCVD
SACVD
Oxidation diffusion
RTP/Thermal oxidation
  • Excellent high temperature stability
  • Exceptional acid & amine resistance
PDF
Perlast® Helios G7HAFFKMBrown-15 to 310°C 
  • Fully organic
  • Outstanding high temperature capability
  • Excellent plasma resistance
  • Low out-gassing
  • Low trace metal content
 
Nanofluor® Y75NHPEAmber/
Translucent
-20 to 225°CPhotolithography/Resist strip
E-UV
  • Exceptional purity (>10K ppb trace metal content)
  • Very low permeability
  • Very low out-gassing
PDF
Nanofluor® Y75GHPEGrey-20 to 260°CResist Strip/Ash
Dielectric Etch
Conductor Etch
  • Exceptional oxygen & chlorine plasma resistance
  • Very low trace metal content
  • Low particle generation
PDF
Nanofluor® Y60LTHPE   
  • Low temperature grade
 
Kimura® K13XHPE Brown/
Amber 
-15 to 280°C Dielectric etch
  • Fully organic
  • Excellent abrasion resistance
  • Ideal for dynamic applications
  • Very low permeability
PDF
V60BFKMBlack-20 to 200°CPlating tools
  • Used on Slit Valve Doors (SVD)
 
V75BFKMBlack-20 to 200°C   
V75GFKMGreen-20 to 200°C   
V75MFKMBrown-20 to 200°C   
V75SCFKMCream-15 to 250°C Copper plating (ECD)
  • Very low permeability
  • Cost effective high performance elastomer
PDF
V75WFKMWhite-20 to 200°CDisplay test chambers  
V77WFKMOff-white-20 to 200°CDisplay EBT tools
  • Low friction material
  • Used on Slit Valve Doors (SVD)
 
V75B751FKMBlack-20 to 200°COLED chambers  
V70M701FKMBrown PVD/MDP applications  
V60BFKMBlack-20 to 200°C   
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