AMAT Approved Materials from PPE
The table below shows the material grades that are currently approved for use by Applied Materials.
Material datasheets can be downloaded by clicking on the PDF link in the last column.
| Compound | Material Type | Color | Operating Temperature | Process Type | Attributes | Datasheet |
| Perlast® G67P | FFKM | Translucent | -15 to 275°C | PECVD/HDPVD Wet Etch/Clean Photolithography Resist Strip |
| |
| Perlast® G74P | FFKM | Translucent | -15 to 275°C | Deposition Etch |
| |
| Perlast® G100XT | FFKM | Clear Translucent | -20 to 275°C | E-UV |
| |
| Perlast® G65HP | FFKM | Light Brown | -15 to 275°C | PECVD/HDPCVD Resist-Strip/Ash Dielectric Etch Condictor Etch NF3 Remote Clean |
| |
| Perlast® G67G | FFKM | Grey | -15 to 300°C | PECVD/HDPCVD Resist Strip/Ash Dielectric Etch Conductor Etch NF3 Remote clean UV cure |
| |
| Perlast® G76W | FFKM | Ivory | -15 to 260°C | CVD |
| |
| Perlast® G75H | FFKM | White | -15 to 320°C | Metal CVD ALD PVD LPCVD SACVD Oxidation diffusion RTP/Thermal Oxidation |
| |
| Perlast® G70H | FFKM | White | -15 to 310°C | PVD |
| |
| Perlast® G70CR | FFKM | Grey | -42 to 200°C | Conductor Etch Dielectric Etch |
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| Perlast® G75B | FFKM | Black | -15 to 325°C | Metal CVD ALD PVD LPCVD SACVD Oxidation diffusion RTP/Thermal oxidation |
| |
| Nanofluor® Y75N | HPE | Amber/ Translucent | -20 to 225°C | Photolithography/Resist strip E-UV |
| |
| Nanofluor® Y75G | HPE | Grey | -20 to 260°C | Resist Strip/Ash Dielectric Etch Conductor Etch |
| |
| Nanofluor® Y60LT | HPE |
| Coming soon | |||
| Kimura® K13X | HPE | Brown/ Amber | -15 to 280°C | Dielectric etch |
| |
| V60B | FKM | Black | -20 to 200°C | Plating tools |
| Coming soon |
| V75B | FKM | Black | -20 to 200°C | PVD |
| Coming soon |
| V75G | FKM | Green | -20 to 200°C | Vacuum pumps | ||
| V75M | FKM | Brown | -20 to 200°C |
| Coming soon | |
| V75SC | FKM | Cream | -15 to 250°C | Copper plating (ECD) |
| |
| V75W | FKM | White | -20 to 200°C | Display test chambers | ||
| V77W | FKM | Off-white | -20 to 200°C | Display EBT tools |
| Coming soon |
| V75B751 | FKM | Black | -20 to 200°C | OLED chambers | Coming soon | |
| V70M701 | FKM | Brown | PVD/MDP applications |
| Coming soon |