Monovat Gate Valves
MONOVAT® gates fitted with Perlast®, Kimura® and Nanofluor® elastomer seals deliver improved performance
MONOVAT® gates are widely used on semiconductor tool platforms. MONOVAT® gates fitted with PPE’s unique Perlast®, Kimura® and Nanofluor® semiconductor grade elastomers deliver reduced particulation, improved yield and reduced cost of ownership.
Features of MONOVAT® Gates fitted with PPE materials:
- Available in various sizes and profiles for different semiconductor manufacturing platforms.
- A broad range of seal profiles designed to reduce localized stresses, resulting in improved seal performance and life time
- Highest levels of plasma and chemical resistance
- Ultra-pure elastomers minimize particulation in processing environments
Case Study Perlast® G67P on MONOVAT® achieved x3 increase in wafer yield
A major semiconductor manufacturer in Asia was experiencing problems with contamination and poor wafer yield in a Low-K CVD process on a Producer® tool. The dynamic MONOVAT® gates were fitted with a traditional white FFKM material and the gates had to be replaced every 15,000 - 30,000 wafers.
Since using MONOVAT® gates fitted with Perlast® G67P, this chip producer achieves over 90,000 wafers, which represents a considerable cost saving. This reflects the ultra-pure material composition, superior chemical resistance and outstanding mechanical properties of Perlast® materials.
How can we help? Contact us with your MONOVAT gate requirements.
MonoVat® is a registered trademark of VAT Vakuumventile AG.