LAM Research Approved Materials from PPE
The table below shows the material grades that are currently approved for use by LAM Research.
Material datasheets can be downloaded by clicking on the PDF link in the last column.
| Compound | Material Type | Color | Operating Temperature | Process Type | Attributes | Datasheet |
| Perlast® G67P | FFKM | Translucent | -15 to 275°C | PECVD/HDPVD Wet Etch/Clean Photolithography Resist Strip |
| Download |
| Perlast® G74P | FFKM | Translucent | -15 to 275°C | Deposition Etch |
| Download |
| Perlast® G100XT | FFKM | Clear Translucent | -20 to 275°C | E-UV |
| Download |
| Perlast® Helios G7HA | FFKM | Brown | -15 to 310°C | All |
| Download |
| Perlast® G65HP | FFKM | Light Brown | -15 to 275°C | PECVD/HDPCVD Resist-Strip/Ash Dielectric Etch Condictor Etch NF3 Remote Clean |
| Download |
| Perlast® G67G | FFKM | Grey | -15 to 300°C | PECVD/HDPCVD Resist Strip/Ash Dielectric Etch Conductor Etch NF3 Remote clean UV cure |
| Download |
| Perlast® G75H | FFKM | White | -15 to 320°C | Metal CVD ALD PVD LPCVD SACVD Oxidation diffusion RTP/Thermal Oxidation |
| Download |
| Perlast® G70H | FFKM | White | -15 to 310°C | PVD |
| Download |
| Perlast® G70CR | FFKM | Grey | -42 to 200°C | Conductor Etch Dielectric Etch |
| Download |
| Perlast® G71H | FFKM | White | -15 to 310°C | Dynamic applications |
| Coming soon |
| Perlast® G80A | FFKM | Black | -15 to 260°C | Wet Etch/Clean Photolithography/Resist Strip |
| Download |
| Perlast® G75B | FFKM | Black | -15 to 325°C | Metal CVD ALD PVD LPCVD SACVD Oxidation diffusion RTP/Thermal oxidation |
| Download |
| Nanofluor® Y75N | HPE | Amber/ Translucent | -20 to 225°C | Photolithography/Resist strip E-UV |
| Download |
| Nanofluor® Y75G | HPE | Grey | -20 to 260°C | Resist Strip/Ash Dielectric Etch Conductor Etch |
| Download |
| Kimura® K2CD | HPE | Red | -15 to 300°C | Metal CVD ALD PVD LPCVD SACVD Oxidation diffusion |
| Download |
| Kimura® K13X | HPE | Brown/ Amber | -15 to 280°C | Dielectric etch |
| Download |
| V60B | FKM | Black | -20 to 200°C |
| Coming soon | |
| V75SC | FKM | Cream | -15 to 250°C | Copper plating (ECD) |
| Download |
| V75B | FKM | Black | -20 to 200°C |
| Coming soon | |
| V75G | FKM | Green | -20 to 200°C |
| Download | |
| V75M | FKM | Brown | -20 to 200°C |
| Coming soon | |
| S40H | VMQ | White | -60 to 250°C |
| Coming soon |