Working in partnership with LAM engineers, PPE developed the first E-seals (or E-bands) for electrostatic chuck (ESC) assemblies. PPE manufactures the custom-designed E-seals from it's Perlast perfluoroelastomer (FFKM) materials, proven to offer the highest levels of purity and performance.
PPE supplies a number of different E-seal sizes and geometries to fit various models of ESC. Their purpose is to provide a barrier seal that protects the chuck from damage caused by arcing or plasma. PPE's E-seals have been proven to reduce the cost of ownership to end-users and provide critical cost savings for LAM by reducing the number of replacement chucks supplied.
PPE continues to support LAM Research with a growing list of new process-enabling E-seals for different locations and applications.
Want more information?
Please contact your account manager Jennifer Lozada:
Tel: +1 408 441 2043
Mobile: +1 408 863 2416
Email: [email protected]
E-seal Elastomer Materials
|Material Code||Hardness||Operating Temperature||Colour||Approvals / Certification|
|Perlast G67P||63||-15°C to +275°C||Translucent beige||LAM qualified|
|Perlast G65HP||65||-15°C to +275°C||Light brown||LAM qualified|
|Perlast G70CR||72||-42°C to +250°C||Grey||On test|
|Perlast G67G||68||-15°C to +300°C||Grey||LAM qualified|
|Perlast Helios G7HA||66||-15°C to +310°C||Brown||LAM qualified|
|Y60LT||63||-51°C to +200°C||Grey||On test|