E-bands (E-seals)
Working in partnership with LAM engineers, PPE developed the first E-seals (or E-bands) for electrostatic chuck (ESC) assemblies. PPE manufactures the custom-designed E-seals from it's Perlast perfluoroelastomer (FFKM) materials, proven to offer the highest levels of purity and performance.
PPE supplies a number of different E-seal sizes and geometries to fit various models of ESC. Their purpose is to provide a barrier seal that protects the chuck from damage caused by arcing or plasma. PPE's E-seals have been proven to reduce the cost of ownership to end-users and provide critical cost savings for LAM by reducing the number of replacement chucks supplied.
PPE continues to support LAM Research with a growing list of new process-enabling E-seals for different locations and applications.
Want more information?
Please contact your account manager Jennifer Lozada:
Tel: +1 408 441 2043
Mobile: +1 408 863 2416
Email: [email protected]
E-seal Elastomer Materials
| Material Code | Hardness | Operating Temperature | Colour | Approvals / Certification |
|---|---|---|---|---|
| Perlast G67P | 63 | -15°C to +275°C | Translucent beige | LAM qualified |
| Perlast G65HP | 65 | -15°C to +275°C | Light brown | LAM qualified |
| Perlast G70CR | 72 | -42°C to +250°C | Grey | On test |
| Perlast G67G | 68 | -15°C to +300°C | Grey | LAM qualified |
| Perlast Helios G7HA | 66 | -15°C to +310°C | Brown | LAM qualified |
| Y60LT | 63 | -51°C to +200°C | Grey | On test |