Bonded Slit Valve Doors
Delivering lower particulation, improved yield and lowest cost of ownership
Bonded Slit Valve Doors (BSVD) play a key role in semiconductor wafer manufacture. PPE provides a range of Slit Valve Door designs coupled with a range of elastomer materials developed specifically for aggressive semiconductor sealing applications.
Bonded slit valve doors produced to your requirements
PPE BSVD’s maximize yields and extend PM cycles by utilizing ultra-pure, wear resistant elastomers that, when matched to specific process chemistries, provide long lifetime and minimized risk of particle contamination in dynamic door applications.
Slit Valve Doors are available in designs for many OEM tool platforms and are optimized to offer the highest levels of sealing performance in aggressive environments.
For new applications PPE Engineers can provide advice on how best to optimize the SVD design, in order to maximize the performance and effective life of the seal.
Features of PPE Bonded Slit Valve Doors:
- Available in a wide range of sizes, profiles and designs.
- Fitted with PPE’s industry-leading range of semiconductor grade elastomers including Perlast®, Kimura® and Nanofluor® offering the highest levels of chemical resistance and reduced particulation in plasma environments.
- A broad range of seal profiles designed to reduce localized stresses, resulting in improved seal performance and life time.
How can we help? Contact us with your BSVD requirements.