PPE offers a range of profiles that maximize sealing integrity and life expectancy for bonded and non-bonded slit valve gates fitted with Perlast® seals.
Perlast® gates maximize wafer yields and PM cycles by utilizing ultra-pure translucent perfluoroelastomers that do not utilize inorganic filler systems such as metal oxides and silicas that can cause particulation in dynamic door applications.
Slit valve gates produced to your requirements
Custom molded formed O-rings, which follow the path of a rectangular groove, greatly extend seal-life by reducing stress levels experienced by toroidal O-rings in the corners.
PPE can help optimize groove design to accommodate seals with circular cross section or can offer retro-fit solutions for existing hardware.
For new applications PPE Engineers can provide design advice on how best to actuate and control the door, in order to prevent leakage and maximize the effective life of the seal.
Large door seals for FPD and Solar panel manufacturing equipment are available as fully molded parts.
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Perlast® G67P on MONOVAT® achieved x3 increase in wafer yield
A major semiconductor manufacturer in Asia was experiencing problems with contamination and poor wafer yield in a Low-K CVD process on a Producer® tool. The dynamic MONOVAT® gates were fitted with a traditional white FFKM material and the gates had to be replaced every 15,000-30,000 wafers
Since using MONOVAT® gates fitted with Perlast® G67P, this chip producer achieves over 90,000 wafers, which represents a considerable cost saving. This reflects the ultra-pure material composition, superior chemical resistance and outstanding mechanical properties of Perlast® materials.
MONOVAT® is a registered trade mark of VAT Vakuumventile AG.