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Kimura® high performance elastomers

A unique range of fully organic elastomers for semiconductor sealing applications which demand extreme plasma resistance.

Kimura o-rings

The Kimura® range of high performance elastomer materials utilize a controlled molecular architecture which provides a unique self-reinforcing polymer structure, elimiating the need for fillers of any kind.  This high purity material breaks new ground in elastomer technology, developed specifically for aggressive semiconductor applications. 

Kimura® elastomers are NOT perfluoroelastomers or any other standard type of elastomer material.  They are a new breed of elastomer, specifically developed by PPE, for the semiconductor industry, to offer a step-change in sealing performance, surpassing what has previously been achievable.

Kimura o-rings

The high purity of the polymer combined with the absence of any fillers makes Kimura® materials suitable for processes involving lower feature sizes. Kimura® materials also provide low coefficient of thermal expansion, low compression set and extremely low etch rates in aggressive plasma environments.


Key Attributes

  • Exceptionally pure - does not contain any fillers which may cause particulation problems.
  • Outstanding plasma resistance – ideal for Chlorine, Fluorine & Oxygen chemistries.
  • Exceptionally low plasma etch rate
  • Kimura o-ringsLow thermal expansion
  • Retro-fits existing O-ring grooves (including FKM & FFKM grooves)
  • Low permeation
  • Low out-gassing
  • Low adhesion (reduced sticking)
  • Low friction, high strength and high modulus make Kimura materials ideal for constant force dynamic applications.


Kimura® is a registered trademark of Precision Polymer Engineering Ltd

 

IDEX - Sealing Solutions
© Copyright Precision Polymer Engineering Ltd.
Registered Office: Greenbank Road, Blackburn, BB1 3EA, England. Registration No. 1476647
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