Kimura® high performance elastomers

A unique range of fully organic elastomers for semiconductor sealing applications which demand extreme plasma resistance.

The Kimura® range of high performance elastomer materials utilize a controlled molecular architecture which provides a unique self-reinforcing polymer structure, elimiating the need for fillers of any kind.  This high purity material breaks new ground in elastomer technology, developed specifically for aggressive semiconductor applications. 

Kimura® elastomers are NOT perfluoroelastomers or any other standard type of elastomer material.  They are a new breed of elastomer, specifically developed by PPE, for the semiconductor industry, to offer a step-change in sealing performance, surpassing what has previously been achievable.

The high purity of the polymer combined with the absence of any fillers makes Kimura® materials suitable for processes involving lower feature sizes. Kimura® materials also provide low coefficient of thermal expansion, low compression set and extremely low etch rates in aggressive plasma environments.

Key Attributes

• Exceptionally pure - does not contain any fillers which may cause particulation problems.
• Outstanding plasma resistance – ideal for Chlorine, Fluorine & Oxygen chemistries.
• Exceptionally low plasma etch rate
• Low thermal expansion
• Retro-fits existing O-ring grooves (including FKM & FFKM grooves)
• Low permeation
• Low out-gassing
• Low adhesion (reduced sticking)
• Low friction, high strength and high modulus make Kimura materials ideal for constant force dynamic applications.

Kimura® is a registered trademark of Precision Polymer Engineering Ltd