Semiconductor
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See us at the following shows:
SEMICON WEST
15-17 July 2008
San Francisco, CA
Booth no. 5505
Semi-conductor production environments represent some of the most aggressive environments encountered by seals.
Seals have to be made of ultra-pure materials, survive extreme temperatures and a mixture of fluorinated gases. For these reasons seals for the semi-conductor industry are at the cutting edge of materials technology.
Our team of scientists and technicians has created a range of specially developed high performance materials for use in critical semiconductor environments.
Emphasis is placed on providing a comprehensive range of materials, including the latest generation of Perfluoroelastomers which offer enhanced performance and improved functionality.
The relentless drive to improve productivity and increase wafer yields have resulted in the desire to increase process temperature, use more aggressive gases and increase plasma density, all of which place increasing demands on current sealing technology.
PPE compounds have been created to withstand temperatures up to 330°C in aggressive media such as fluorine cleaning gases. The result is a new range of materials that extend maintenance cycles, reduce particle generation and lower chamber leakage rates.
Further information :
Pure Perfluoroelastomer seals for semi-conductor applications (PR article).
PEEK bonded seal gives Equipment Manufacturers' competitive edge (PR article).
Made-to-measure Perfluoroelastomer parts
Case Studies:
Perlast extends maintenance cycles by 40%