Perlast® G67P
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Perlast® G67P is an ultra-pure, translucent perfluoroelastomer compound developed to meet the demands of the semiconductor and bio-analytical industries. Perlast® G67P combines a fully fluorinated polymer backbone, a fully fluorinated organic filler system and a highly fluorinated cross-linking process, resulting in a material with unrivalled purity, chemical resistance and mechanical properties, ideal for use in critical semiconductor processes such as Lithography, PVD, CVD, Etch, Stripping and Cleaning. Perlast® G67P has a low compressive modulus making it highly compliant. So for a given compression, it exhibits a low reaction force, this results in lower stress on the seal, which leads to longer life expectancy.
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